Inventor
WOLTER ALEXANDER
DE10 patents
⚠️ This page may combine multiple inventors who share the name “WOLTER ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FRAUNHOFER GES FORSCHUNG
7 patentsUS7469834B2Dec 30, 2008
Scanner and method for operating a scanner
FRAUNHOFER GES FORSCHUNG11 citations76
US7369288B2May 6, 2008
Micromechanical optical element having a reflective surface as well as its use
FRAUNHOFER GES FORSCHUNG8 citations72
US8357944B2Jan 22, 2013
Semiconductor substrate and methods for the production thereof
FRAUNHOFER GES FORSCHUNG3 citations61
US7940439B2May 10, 2011
Method for generating a micromechanical structure
FRAUNHOFER GES FORSCHUNG3 citations61
US7932788B2Apr 26, 2011
Oscillating, deflectable micromechanical element and method for use thereof
FRAUNHOFER GES FORSCHUNG3 citations61
US7847997B2Dec 7, 2010
Projection apparatus for scanningly projection
FRAUNHOFER GES FORSCHUNG5 citations59
US7951635B2May 31, 2011
Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use
FRAUNHOFER GES FORSCHUNG1 citations51