Inventor
FUJISHIMA HIRONOBU
JP6 patents
⚠️ This page may combine multiple inventors who share the name “FUJISHIMA HIRONOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
5 patentsUS11231573B2Jan 25, 2022
Position detection apparatus, exposure apparatus, and article manufacturing method
CANON KK3 citations70
US10747116B2Aug 18, 2020
Pattern forming apparatus and article manufacturing method
CANON KK3 citations68
US12429795B2Sep 30, 2025
Detection apparatus, lithography apparatus, and article manufacturing method
CANON KK0 citations50
US12405538B2Sep 2, 2025
Calibration method, detection system, exposure apparatus, article manufacturing method, and non-transitory computer-readable storage medium
CANON KK0 citations49
US10545415B2Jan 28, 2020
Detection apparatus, pattern forming apparatus, obtaining method, detection method, and article manufacturing method
CANON KK0 citations36