Inventor

IKARI HIROSHI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “IKARI HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US10186402B2Jan 22, 2019

Measurement system and measurement method

TOKYO ELECTRON LTD16 citations81

US10133266B2Nov 20, 2018

Conveyance robot replacement apparatus and conveyance robot replacement method

TOKYO ELECTRON LTD1 citations48

IKARI HIROSHI

1 patent

US8518187B2Aug 27, 2013

Transfer pick cleaning method

IKARI HIROSHI2 citations49