Inventor
TSAI JANG-SHIANG
TW10 patents
⚠️ This page may combine multiple inventors who share the name “TSAI JANG-SHIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS9502287B2Nov 22, 2016
Method of preventing pattern collapse
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11355642B2Jun 7, 2022
Method for manufacturing semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11043453B2Jun 22, 2021
Method of preventing pattern collapse
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10483397B2Nov 19, 2019
Fin field effect transistor and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US10515895B2Dec 24, 2019
Method of preventing pattern collapse
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
TAIWAN SEMICONDUCTOR MFG
4 patentsUS9153479B2Oct 6, 2015
Method of preventing a pattern collapse
TAIWAN SEMICONDUCTOR MFG7 citations83
US7029992B2Apr 18, 2006
Low oxygen content photoresist stripping process for low dielectric constant materials
TAIWAN SEMICONDUCTOR MFG9 citations73
US7598176B2Oct 6, 2009
Method for photoresist stripping and treatment of low-k dielectric material
TAIWAN SEMICONDUCTOR MFG2 citations62
US7400401B2Jul 15, 2008
Measuring low dielectric constant film properties during processing
TAIWAN SEMICONDUCTOR MFG0 citations41