Inventor
WEI JUNWEI
US3 patents
Patents
3 patentsUS9709510B2Jul 18, 2017
Determining a configuration for an optical element positioned in a collection aperture during wafer inspection
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US10082470B2Sep 25, 2018
Defect marking for semiconductor wafer inspection
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US10215713B2Feb 26, 2019
Determining a configuration for an optical element positioned in a collection aperture during wafer inspection
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