Inventor
LODDER ROGIER
CH9 patents
⚠️ This page may combine multiple inventors who share the name “LODDER ROGIER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EVATEC AG
4 patentsUS10138553B2Nov 27, 2018
Vacuum treatment apparatus
EVATEC AG12 citations81
US11776825B2Oct 3, 2023
Chamber for degassing substrates
EVATEC AG2 citations65
US12249523B2Mar 11, 2025
Wafer holder and temperature conditioning arrangement and method of manufacturing a wafer
EVATEC AG0 citations55
US10590538B2Mar 17, 2020
Vacuum treatment apparatus
EVATEC AG0 citations49