Inventor
KOMATSU KOICHIRO
JP19 patents
⚠️ This page may combine multiple inventors who share the name “KOMATSU KOICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
14 patentsUS5859707AJan 12, 1999
Position detection apparatus and aligner comprising same
NIKON CORP64 citations96
US5070250ADec 3, 1991
Position detection apparatus with adjustable beam and interference fringe positions
NIKON CORP61 citations96
US6512578B1Jan 28, 2003
Method and apparatus for surface inspection
NIKON CORP57 citations94
US7298471B2Nov 20, 2007
Surface inspection apparatus and surface inspection method
NIKON CORP12 citations92
US6774987B2Aug 10, 2004
Surface inspection method, surface inspection apparatus, and recording medium and data signal for providing surface inspection program
NIKON CORP23 citations92
US6563577B2May 13, 2003
Defect testing apparatus and defect testing method
NIKON CORP19 citations92
US6313913B1Nov 6, 2001
Surface inspection apparatus and method
NIKON CORP39 citations92
US6097483AAug 1, 2000
Image detection apparatus
NIKON CORP26 citations92
US5907396AMay 25, 1999
Optical detection system for detecting defects and/or particles on a substrate
NIKON CORP25 citations92
US5171999ADec 15, 1992
Adjustable beam and interference fringe position
NIKON CORP40 citations92
US8049901B2Nov 1, 2011
Measuring device and measuring method
NIKON CORP12 citations84
US7324274B2Jan 29, 2008
Microscope and immersion objective lens
NIKON CORP14 citations82
US8687182B2Apr 1, 2014
Surface inspection apparatus and surface inspection method
NIKON CORP1 citations62
US7834993B2Nov 16, 2010
Surface inspection apparatus and surface inspection method
NIKON CORP0 citations52