Inventor

FUKUDA YASUAKI

JP29 patents

⚠️ This page may combine multiple inventors who share the name “FUKUDA YASUAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUKUDA YASUAKI

CANON KK

X-ray reduction projection exposure system of reflection type

System and process for inspecting and repairing an original

Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray

Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray

Reflection type mask

Method of and apparatus for stabilizing shapes of objects, such as optical elements, as well as exposure apparatus using same and method of manufacturing semiconductor devices

X-ray exposure method and apparatus and device manufacturing method

Mask for lithography

X-ray transmitting window and method of mounting the same

Multilayer film for X-rays

Production method of an x-ray mask structure, an x-ray mask structure produced thereby, and a device fabricated by using the x-ray mask structure

X-ray mask structure

X-ray microscope

X-ray exposure apparatus

X-ray mask structure, preparation thereof and X-ray exposure method

Mask structure for x-ray exposure and x-ray exposure device and method using it

Reflection device

X-ray mask support and process for preparation thereof

Lithographic mask structure and device for positioning the same

X-ray mask support member, X-ray mask, and X-ray exposure process using the X-ray mask

X-ray exposure apparatus

Exposure apparatus for synchrotron radiation lithography

Method of making X-ray mask structure

Process for preparing an X-ray mask structure

X-ray exposure process for preventing electrostatic attraction or contact of X-ray masks

Exposure apparatus, and device manufacturing method

Apparatus for cleaning an optical element for use with a radiation beam

FUKUDA YASUAKI

Skin-beautifying cosmetic composition

SHARP KK

Image forming apparatus