Inventor

HISAKI TOMOKO

3 patents

Patents

3 patents

US4320191AMar 16, 1982

Pattern-forming process

NIPPON TELEGRAPH & TELEPHONE333 citations97

US4434224AFeb 28, 1984

Method of pattern formation

NIPPON TELEGRAPH & TELEPHONE28 citations90

US4350541ASep 21, 1982

Doping from a photoresist layer

NIPPON TELEGRAPH & TELEPHONE27 citations80