P

Inventor

WATANABE YUTAKA

JP177 patents
⚠️ This page may combine multiple inventors who share the name “WATANABE YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

22 patents
US5153898AOct 6, 1992

X-ray reduction projection exposure system of reflection type

CANON KK158 citations99
US5641593AJun 24, 1997

Lithographic mask and exposure apparatus using the same

CANON KK106 citations97
US6317479B1Nov 13, 2001

X-ray mask, and exposure method and apparatus using the same

CANON KK75 citations96
US5433988AJul 18, 1995

Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray

CANON KK80 citations96
US5310603AMay 10, 1994

Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray

CANON KK66 citations96
US5052033ASep 24, 1991

Reflection type mask

CANON KK75 citations96
US6647086B2Nov 11, 2003

X-ray exposure apparatus

CANON KK39 citations93
US5825844AOct 20, 1998

Optical arrangement and illumination method

CANON KK22 citations93
US5606586AFeb 25, 1997

X-ray exposure method and apparatus and device manufacturing method

CANON KK21 citations93
US5572563ANov 5, 1996

Mirror unit and an exposure apparatus using the unit

CANON KK24 citations93
US5503950AApr 2, 1996

Reflection type mask and manufacture of microdevices using the same

CANON KK30 citations93
US5394451AFeb 28, 1995

Optical arrangement for exposure apparatus

CANON KK23 citations93
US5285488AFeb 8, 1994

Exposure apparatus

CANON KK33 citations93
US5159621AOct 27, 1992

X-ray transmitting window and method of mounting the same

CANON KK22 citations93
US6867843B2Mar 15, 2005

Debris removing system for use in X-ray light source

CANON KK35 citations92
US6728332B2Apr 27, 2004

X-ray mask, and exposure method and apparatus using the same

CANON KK20 citations92
US5835560ANov 10, 1998

Exposure apparatus

CANON KK33 citations92
US5549994AAug 27, 1996

Exposure apparatus and reflection type mask to be used in the same

CANON KK25 citations92
US5461657AOct 24, 1995

X-ray mirror, and x-ray exposure apparatus and device manufacturing method employing the same

CANON KK24 citations92
US5204887AApr 20, 1993

X-ray microscope

CANON KK49 citations92
US5123036AJun 16, 1992

X-ray exposure apparatus

CANON KK32 citations92
US5125014AJun 23, 1992

X-ray exposure apparatus

CANON KK25 citations91

HITACHI LTD

8 patents

HITACHI CONSTRUCTION MACHINERY

4 patents

ADVANTEST CORP

4 patents

MITSUI TOATSU CHEMICALS

3 patents

FUJITSU LTD

2 patents

AISIN SEIKI

2 patents

SIEMENS AG

2 patents

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

1 patent

TOSHIBA KK

1 patent

RIKEN

1 patent

Showing the top 50 of 177 patents by PatentIndex Score.