P

Inventor

CUI CHUNSHI

US6 patents
⚠️ This page may combine multiple inventors who share the name “CUI CHUNSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

5 patents
US6238588B1May 29, 2001

High pressure high non-reactive diluent gas content high plasma ion density plasma oxide etch process

APPLIED MATERIALS INC84 citations97
US5965463AOct 12, 1999

Silane etching process

APPLIED MATERIALS INC44 citations92
US6652712B2Nov 25, 2003

Inductive antenna for a plasma reactor producing reduced fluorine dissociation

APPLIED MATERIALS INC29 citations91
US6667577B2Dec 23, 2003

Plasma reactor with spoke antenna having a VHF mode with the spokes in phase

APPLIED MATERIALS INC28 citations90
US6544429B1Apr 8, 2003

Enhancement of silicon oxide etch rate and substrate selectivity with xenon addition

APPLIED MATERIALS INC15 citations81

(unassigned)

1 patent
US6797189B2Sep 28, 2004

Enhancement of silicon oxide etch rate and nitride selectivity using hexafluorobutadiene or other heavy perfluorocarbon

217 citations97