Inventor · disambiguated record
Yoshimitsu Saze
Also filed as: SAZE YOSHIMITSU
3 granted patents·13 citations·filing 1991–2005
64Inventor score
Top patents by PatentIndex Score
3 records- 0164US7342241B2Method and apparatus for electron-beam lithographyHITACHI HIGH TECH CORP·Filed 2005·Granted Mar 11, 2008·2 cites·12 claims
- 0239US5214493AReduction exposure apparatus with correction for alignment light having inhomogeneous intensity distributionHITACHI LTD·Filed 1991·Granted May 25, 1993·6 cites·14 claims
- 0334US5164789AMethod and apparatus for measuring minute displacement by subject light diffracted and reflected from a grating to heterodyne interferenceHITACHI LTD·Filed 1991·Granted Nov 17, 1992·5 cites·17 claims
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