Inventor

SCHUPP DETLEF

DE2 patents

⚠️ This page may combine multiple inventors who share the name “SCHUPP DETLEF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR MIE GMBH

1 patent

US7623698B2Nov 24, 2009

Method of learning a knowledge-based database used in automatic defect classification

KLA TENCOR MIE GMBH3 citations51

VISTEC SEMICONDUCTOR SYS GMBH

1 patent

US7768637B2Aug 3, 2010

Method for acquiring high-resolution images of defects on the upper surface of the wafer edge

VISTEC SEMICONDUCTOR SYS GMBH6 citations50