Inventor
OGURA SHIGETARO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “OGURA SHIGETARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
9 patentsUS5153898AOct 6, 1992
X-ray reduction projection exposure system of reflection type
CANON KK158 citations99
US5433988AJul 18, 1995
Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray
CANON KK80 citations96
US5310603AMay 10, 1994
Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray
CANON KK66 citations96
US5052033ASep 24, 1991
Reflection type mask
CANON KK75 citations96
US4707059ANov 17, 1987
Integrated optical circuit element and method of making the same
CANON KK29 citations92
US4637684AJan 20, 1987
Method of making an optical coupler device utilizing volatile liquid to achieve optical contact
CANON KK36 citations92
US4531138AJul 23, 1985
Liquid jet recording method and apparatus
CANON KK22 citations82
US5012500AApr 30, 1991
X-ray mask support member, X-ray mask, and X-ray exposure process using the X-ray mask
CANON KK16 citations74
US4856861AAug 15, 1989
Light waveguide lens
CANON KK14 citations74
SHINCRON CO LTD
2 patentsUS6207536B1Mar 27, 2001
Method for forming a thin film of a composite metal compound and apparatus for carrying out the method
SHINCRON CO LTD67 citations95
US6328865B2Dec 11, 2001
Method for forming a thin film of a composite metal compound and apparatus for carrying out the method
SHINCRON CO LTD7 citations73