Inventor
KIYOTAKE TOSHIO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “KIYOTAKE TOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6824343B2Nov 30, 2004
Substrate support
APPLIED MATERIALS INC20 citations92
US7440091B2Oct 21, 2008
Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
APPLIED MATERIALS INC16 citations89
US7735710B2Jun 15, 2010
Substrate support
APPLIED MATERIALS INC10 citations84
US8033245B2Oct 11, 2011
Substrate support bushing
APPLIED MATERIALS INC5 citations73
US7834994B2Nov 16, 2010
Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
APPLIED MATERIALS INC2 citations60