Inventor · disambiguated record
Chul Soo Byun
Also filed as: BYUN CHUL SOO
8 granted patents·249 citations·filing 2004–2015
87Inventor score
Top patents by PatentIndex Score
8 records- 0194US7479303B2Method for chemical vapor deposition (CVD) with showerhead and method thereofPIEZONICA CO LTD·Filed 2006·Granted Jan 20, 2009·146 cites·6 claims
- 0293US8882913B2Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereofBYUN CHUL SOO·Filed 2007·Granted Nov 11, 2014·48 cites·8 claims
- 0393US8298370B2Apparatus for chemical vapor deposition (CVD) with showerheadBYUN CHUL SOO·Filed 2009·Granted Oct 30, 2012·28 cites·10 claims
- 0492US9476121B2Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereofPIEZONICS CO LTD·Filed 2014·Granted Oct 25, 2016·21 cites·7 claims
- 0580US9469900B2Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereofPIEZONICS CO LTD·Filed 2014·Granted Oct 18, 2016·4 cites·5 claims
- 0656US10161040B2Shower head for electronic device having dispersion pins fabrication and shower head assemblyKOREA INST IND TECH·Filed 2014·Granted Dec 25, 2018·0 cites·9 claims
- 0744US10704145B2Reaction chamber for chemical vapor apparatusKOREA INST IND TECH·Filed 2015·Granted Jul 7, 2020·0 cites·8 claims
- 0838US7488057B2Piezoelectric ink jet printer head and its manufacturing processPIEZONICS CO LTD·Filed 2004·Granted Feb 10, 2009·2 cites·10 claims
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