Inventor
CHANG CHIA JUI
TW7 patents
⚠️ This page may combine multiple inventors who share the name “CHANG CHIA JUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
4 patentsUS6220930B1Apr 24, 2001
Wafer polishing head
UNITED MICROELECTRONICS CORP23 citations91
US6036356AMar 14, 2000
In-situ slurry mixing apparatus
UNITED MICROELECTRONICS CORP17 citations83
US6096162AAug 1, 2000
Chemical mechanical polishing machine
UNITED MICROELECTRONICS CORP7 citations72
US6280079B1Aug 28, 2001
Method of mixing slurries
UNITED MICROELECTRONICS CORP5 citations62