Inventor

ASHTIANI KAIHAN ABIDI

US9 patents

⚠️ This page may combine multiple inventors who share the name “ASHTIANI KAIHAN ABIDI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

5 patents

US11348795B2May 31, 2022

Metal fill process for three-dimensional vertical NAND wordline

LAM RES CORP7 citations86

US11049716B2Jun 29, 2021

Gap fill using carbon-based films

LAM RES CORP11 citations83

US10049921B2Aug 14, 2018

Method for selectively sealing ultra low-k porous dielectric layer using flowable dielectric film formed from vapor phase dielectric precursor

LAM RES CORP15 citations82

US10438847B2Oct 8, 2019

Manganese barrier and adhesion layers for cobalt

LAM RES CORP6 citations73

US9284644B2Mar 15, 2016

Apparatus and method for improving wafer uniformity

LAM RES CORP1 citations45

NOVELLUS SYSTEMS INC

1 patent

US6193854B1Feb 27, 2001

Apparatus and method for controlling erosion profile in hollow cathode magnetron sputter source

NOVELLUS SYSTEMS INC145 citations96

SONY CORP

1 patent

US5669975ASep 23, 1997

Plasma producing method and apparatus including an inductively-coupled plasma source

SONY CORP107 citations96

ROY SHAMBHU N

1 patent

US9447499B2Sep 20, 2016

Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery

ROY SHAMBHU N24 citations92

TOKYO ELECTRON LTD

1 patent

US6083363AJul 4, 2000

Apparatus and method for uniform, low-damage anisotropic plasma processing

TOKYO ELECTRON LTD109 citations92