Inventor

TSENG CHI-CHE

TW3 patents

Patents

3 patents

US10361286B2Jul 23, 2019

Method and structure for mandrel and spacer patterning

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations79

US12543549B2Feb 3, 2026

Method of overlay measurement

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48

US10818779B2Oct 27, 2020

Method and structure for mandrel and spacer patterning

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47