P

Inventor

MAKI KEIGO

JP7 patents
⚠️ This page may combine multiple inventors who share the name “MAKI KEIGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUMITOMO OSAKA CEMENT CO LTD

3 patents
US7678197B2Mar 16, 2010

Susceptor device

SUMITOMO OSAKA CEMENT CO LTD541 citations96
US6689984B2Feb 10, 2004

Susceptor with built-in electrode and manufacturing method therefor

SUMITOMO OSAKA CEMENT CO LTD6 citations60
US11024528B2Jun 1, 2021

Electrostatic chuck device having focus ring

SUMITOMO OSAKA CEMENT CO LTD0 citations49

TOKYO ELECTRON LTD

1 patent
US7619870B2Nov 17, 2009

Electrostatic chuck

TOKYO ELECTRON LTD24 citations92

HIMORI SHINJI

1 patent
US8284538B2Oct 9, 2012

Electrostatic chuck device

HIMORI SHINJI5 citations61

INAZUMACHI HIROSHI

1 patent
US8264813B2Sep 11, 2012

Electrostatic chuck device

INAZUMACHI HIROSHI1 citations44

MAKI KEIGO

1 patent
US8168452B2May 1, 2012

Method for manufacturing semiconductor device

MAKI KEIGO0 citations33