Inventor
MADHAVAN ATUL
US8 patents
Patents
8 patentsUS11031487B2Jun 8, 2021
Contact over active gate structures for advanced integrated circuit structure fabrication
INTEL CORP7 citations92
US10541316B2Jan 21, 2020
Contact over active gate structures for advanced integrated circuit structure fabrication
INTEL CORP9 citations92
US11581420B2Feb 14, 2023
Contact over active gate structures for advanced integrated circuit structure fabrication
INTEL CORP2 citations81
US11393754B2Jul 19, 2022
Contact over active gate structures with etch stop layers for advanced integrated circuit structure fabrication
INTEL CORP3 citations70
US12406931B2Sep 2, 2025
Contact over active gate structures with etch stop layers for advanced integrated circuit structure fabrication
INTEL CORP0 citations60
US12261122B2Mar 25, 2025
Contact over active gate structures with etch stop layers for advanced integrated circuit structure fabrication
INTEL CORP0 citations60
US12394722B2Aug 19, 2025
Dielectric capacitance recovery of inter-layer dielectric layers for advanced integrated circuit structure fabrication
INTEL CORP0 citations58
US12142667B2Nov 12, 2024
Contact over active gate structures for advanced integrated circuit structure fabrication
INTEL CORP0 citations51