P

Inventor

SATO TAKETOSHI

JP37 patents
⚠️ This page may combine multiple inventors who share the name “SATO TAKETOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

12 patents
US7900580B2Mar 8, 2011

Substrate processing apparatus and reaction container

HITACHI INT ELECTRIC INC27 citations92
US7779785B2Aug 24, 2010

Production method for semiconductor device and substrate processing apparatus

HITACHI INT ELECTRIC INC21 citations92
US8047158B2Nov 1, 2011

Substrate processing apparatus and reaction container

HITACHI INT ELECTRIC INC8 citations84
US8039404B2Oct 18, 2011

Production method for semiconductor device

HITACHI INT ELECTRIC INC9 citations84
US9064695B1Jun 23, 2015

Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC5 citations73
US9337015B2May 10, 2016

Method of manufacturing a semiconductor device, method of processing a substrate, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC5 citations68
US9184046B2Nov 10, 2015

Semiconductor device manufacturing and processing methods and apparatuses for forming a film

HITACHI INT ELECTRIC INC2 citations63
US9587314B2Mar 7, 2017

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC1 citations52
US9502236B2Nov 22, 2016

Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC0 citations52
US7892983B2Feb 22, 2011

Substrate processing apparatus and producing method of semiconductor device

HITACHI INT ELECTRIC INC1 citations52
US9831083B2Nov 28, 2017

Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC0 citations50
US9111748B2Aug 18, 2015

Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer readable recording medium

HITACHI INT ELECTRIC INC0 citations39

SHIMANO KK

5 patents

SONY CORP

5 patents

DENSO CORP

3 patents

SATO TAKETOSHI

3 patents

NIPPON DENSO CO

2 patents

MIYA HIRONOBU

2 patents

OGAWA ARITO

1 patent

KONTANI TADASHI

1 patent

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

1 patent

TAKEDA TSUYOSHI

1 patent

SHINETSU HANDOTAI KK

1 patent