Inventor

MORIUCHI NOBORU

JP16 patents

⚠️ This page may combine multiple inventors who share the name “MORIUCHI NOBORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

14 patents

US5436095AJul 25, 1995

Manufacturing method or an exposing method for a semiconductor device for a semiconductor integrated circuit device and a mask used therefor

HITACHI LTD65 citations96

US5298365AMar 29, 1994

Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process

HITACHI LTD59 citations96

US5196910AMar 23, 1993

Semiconductor memory device with recessed array region

HITACHI LTD108 citations96

US4882289ANov 21, 1989

Method of making a semiconductor memory device with recessed array region

HITACHI LTD85 citations96

US6153357ANov 28, 2000

Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process

HITACHI LTD16 citations92

US5736300AApr 7, 1998

Manufacturing method or an exposing method for a semiconductor device or a semiconductor integrated circuit device and a mask used therefor

HITACHI LTD25 citations92

US5405810AApr 11, 1995

Alignment method and apparatus

HITACHI LTD36 citations92

US5725971AMar 10, 1998

Method of manufacturing phase shift masks and a method of manufacturing semiconductor integrated circuit devices

HITACHI LTD22 citations91

USRE38296ENov 4, 2003

Semiconductor memory device with recessed array region

HITACHI LTD17 citations84

US5753416AMay 19, 1998

Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process

HITACHI LTD16 citations82

US5667941ASep 16, 1997

Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process

HITACHI LTD17 citations82

US5578422ANov 26, 1996

Manufacturing method or an exposing method for a semiconductor device or a semiconductor integrated circuit device and a mask used therefor

HITACHI LTD15 citations82

US5455144AOct 3, 1995

Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process

HITACHI LTD19 citations82

USRE37996EFeb 18, 2003

Manufacturing method or an exposing method for a semiconductor device or a semiconductor integrated circuit device and a mask used therefor

HITACHI LTD4 citations62

NITTO DENKO CORP

1 patent

US5466325ANov 14, 1995

Resist removing method, and curable pressure-sensitive adhesive, adhesive sheets and apparatus used for the method

NITTO DENKO CORP83 citations95

RENESAS TECH CORP

1 patent

US6794118B2Sep 21, 2004

Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process

RENESAS TECH CORP4 citations74