Inventor
MATSUMURA KIMIHARU
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MATSUMURA KIMIHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS4812201AMar 14, 1989
Method of ashing layers, and apparatus for ashing layers
TOKYO ELECTRON LTD481 citations96
US5151871ASep 29, 1992
Method for heat-processing semiconductor device and apparatus for the same
TOKYO ELECTRON LTD69 citations94
US5254367AOct 19, 1993
Coating method and apparatus
TOKYO ELECTRON LTD42 citations92
US5038608AAug 13, 1991
Method for measuring the flow rate of exhaust gas
TOKYO ELECTRON LTD6 citations62
TEL KYUSHU KK
3 patentsUS5445699AAug 29, 1995
Processing apparatus with a gas distributor having back and forth parallel movement relative to a workpiece support surface
TEL KYUSHU KK92 citations95
US5249142ASep 28, 1993
Indirect temperature-measurement of films formed on semiconductor wafers
TEL KYUSHU KK34 citations91
US5225663AJul 6, 1993
Heat process device
TEL KYUSHU KK25 citations91