Inventor
LEE CHIARN-LUNG
TW6 patents
Patents
6 patentsUS6090675AJul 18, 2000
Formation of dielectric layer employing high ozone:tetraethyl-ortho-silicate ratios during chemical vapor deposition
TAIWAN SEMICONDUCTOR MFG63 citations93
US5865900AFeb 2, 1999
Etch method for removing metal-fluoropolymer residues
TAIWAN SEMICONDUCTOR MFG18 citations79
US6294483B1Sep 25, 2001
Method for preventing delamination of APCVD BPSG films
TAIWAN SEMICONDUCTOR MFG9 citations71
US5935876AAug 10, 1999
Via structure using a composite dielectric layer
TAIWAN SEMICONDUCTOR MFG14 citations70
US6440859B1Aug 27, 2002
Method for etching passivation layer of wafer
TAIWAN SEMICONDUCTOR MFG5 citations56
US6245688B1Jun 12, 2001
Dry Air/N2 post treatment to avoid the formation of B/P precipitation after BPSG film deposition
TAIWAN SEMICONDUCTOR MFG2 citations55