Inventor
HUNTER AARON M
US14 patents
⚠️ This page may combine multiple inventors who share the name “HUNTER AARON M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS9390950B2Jul 12, 2016
Rapid thermal processing chamber with micro-positioning system
APPLIED MATERIALS INC15 citations92
US6007241ADec 28, 1999
Apparatus and method for measuring substrate temperature
APPLIED MATERIALS INC36 citations92
US7509035B2Mar 24, 2009
Lamp array for thermal processing exhibiting improved radial uniformity
APPLIED MATERIALS INC37 citations88
US9564349B2Feb 7, 2017
Rapid thermal processing chamber with micro-positioning system
APPLIED MATERIALS INC4 citations84
US8900889B2Dec 2, 2014
Rapid thermal processing chamber with micro-positioning system
APPLIED MATERIALS INC10 citations84
US8367983B2Feb 5, 2013
Apparatus including heating source reflective filter for pyrometry
APPLIED MATERIALS INC14 citations84
US7717617B2May 18, 2010
Multiple band pass filtering for pyrometry in laser based annealing systems
APPLIED MATERIALS INC3 citations63
US7438468B2Oct 21, 2008
Multiple band pass filtering for pyrometry in laser based annealing systems
APPLIED MATERIALS INC4 citations63
US7422988B2Sep 9, 2008
Rapid detection of imminent failure in laser thermal processing of a substrate
APPLIED MATERIALS INC4 citations63