Inventor

MACHIDA YASUHIDE

JP2 patents

⚠️ This page may combine multiple inventors who share the name “MACHIDA YASUHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJITSU LTD

1 patent

US6060717AMay 9, 2000

Charged particle beam exposure method and charged particle beam exposure apparatus therefor

FUJITSU LTD7 citations70

FUJITSU SEMICONDUCTOR LTD

1 patent

US7977018B2Jul 12, 2011

Exposure data preparation method and exposure method

FUJITSU SEMICONDUCTOR LTD1 citations46