Inventor
RANFT CRAIG
US4 patents
Patents
4 patentsUS6335293B1Jan 1, 2002
Systems and methods for two-sided etch of a semiconductor substrate
MATTSON TECH INC384 citations95
US6536449B1Mar 25, 2003
Downstream surface cleaning process
MATTSON TECH INC61 citations93
US6379576B2Apr 30, 2002
Systems and methods for variable mode plasma enhanced processing of semiconductor wafers
MATTSON TECH INC47 citations93
US6624082B2Sep 23, 2003
Systems and methods for two-sided etch of a semiconductor substrate
MATTSON TECH INC23 citations89