Inventor
UCHIDA RYUSUKE
US11 patents
⚠️ This page may combine multiple inventors who share the name “UCHIDA RYUSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
10 patentsUS6387587B1May 14, 2002
Positive-working chemical-amplification photoresist composition
TOKYO OHKA KOGYO CO LTD22 citations92
US6255041B1Jul 3, 2001
Method for formation of patterned resist layer
TOKYO OHKA KOGYO CO LTD16 citations83
US6284430B1Sep 4, 2001
Positive-working chemical-amplification photoresist composition and method for forming a resist pattern using the same
TOKYO OHKA KOGYO CO LTD8 citations73
US6890697B2May 10, 2005
Positive-working chemical-amplification photoresist composition
TOKYO OHKA KOGYO CO LTD2 citations62
US6869745B2Mar 22, 2005
Positive-working chemical-amplification photoresist composition
TOKYO OHKA KOGYO CO LTD2 citations62
US6815144B2Nov 9, 2004
Positive-working chemical-amplification photoresist composition
TOKYO OHKA KOGYO CO LTD2 citations62
US7147984B2Dec 12, 2006
Positive-working chemical-amplification photoresist composition
TOKYO OHKA KOGYO CO LTD2 citations57
US6773863B2Aug 10, 2004
Positive-working chemical-amplification photoresist composition
TOKYO OHKA KOGYO CO LTD0 citations51
US6548229B2Apr 15, 2003
Positive-working chemical-amplification photoresist composition and method for forming a resist pattern using the same
TOKYO OHKA KOGYO CO LTD0 citations51
US10363585B2Jul 30, 2019
Cleaning solution, method of removing a removal target and method of etching a substrate using said cleaning solution
TOKYO OHKA KOGYO CO LTD0 citations46