Inventor
GLENN WALTER BENJAMIN
US6 patents
⚠️ This page may combine multiple inventors who share the name “GLENN WALTER BENJAMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6784096B2Aug 31, 2004
Methods and apparatus for forming barrier layers in high aspect ratio vias
APPLIED MATERIALS INC137 citations99
US6866746B2Mar 15, 2005
Clamshell and small volume chamber with fixed substrate support
APPLIED MATERIALS INC130 citations97
US7175713B2Feb 13, 2007
Apparatus for cyclical deposition of thin films
APPLIED MATERIALS INC110 citations96
US6974771B2Dec 13, 2005
Methods and apparatus for forming barrier layers in high aspect ratio vias
APPLIED MATERIALS INC46 citations96
US7547644B2Jun 16, 2009
Methods and apparatus for forming barrier layers in high aspect ratio vias
APPLIED MATERIALS INC5 citations74