Inventor
KIHARA NAOTO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “KIHARA NAOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
4 patentsUS6765217B1Jul 20, 2004
Charged-particle-beam mapping projection-optical systems and methods for adjusting same
NIKON CORP37 citations92
US6717145B1Apr 6, 2004
Mapping electron microscopes exhibiting improved imaging of specimen having chargeable bodies
NIKON CORP11 citations73
US7064339B2Jun 20, 2006
Charged-particle-beam mapping projection-optical systems and methods for adjusting same
NIKON CORP2 citations63
US7183562B2Feb 27, 2007
Charged-particle-beam mapping projection-optical systems and methods for adjusting same
NIKON CORP0 citations52
EBARA CORP
3 patentsUS6593152B2Jul 15, 2003
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP109 citations99
US7247848B2Jul 24, 2007
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP28 citations92
US7745784B2Jun 29, 2010
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP4 citations62