Inventor

LIM HEE YOUL

KR2 patents

Patents

2 patents

US7494935B2Feb 24, 2009

Method for forming fine pattern of semiconductor device

HYNIX SEMICONDUCTOR INC4 citations58

US7723170B2May 25, 2010

Method for forming transistor of semiconductor device using double patterning technology

HYNIX SEMICONDUCTOR INC4 citations53