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Inventor
SUMMERS JEFFREY F
US
2 patents
Patents
2 patents
US7528691B2
May 5, 2009
Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture
INNOVATIVE MICRO TECHNOLOGY
32 citations
87
US7713786B2
May 11, 2010
Etching/bonding chamber for encapsulated devices and method of use
INNOVATIVE MICRO TECHNOLOGY
2 citations
58