Inventor
LOHOKARE SHRIKANT P
US10 patents
⚠️ This page may combine multiple inventors who share the name “LOHOKARE SHRIKANT P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
9 patentsUS7217649B2May 15, 2007
System and method for stress free conductor removal
LAM RES CORP23 citations92
US7413673B2Aug 19, 2008
Method for adjusting voltage on a powered Faraday shield
LAM RES CORP17 citations84
US6939796B2Sep 6, 2005
System, method and apparatus for improved global dual-damascene planarization
LAM RES CORP14 citations83
US7140374B2Nov 28, 2006
System, method and apparatus for self-cleaning dry etch
LAM RES CORP8 citations73
US7129167B1Oct 31, 2006
Methods and systems for a stress-free cleaning a surface of a substrate
LAM RES CORP10 citations73
US7232766B2Jun 19, 2007
System and method for surface reduction, passivation, corrosion prevention and activation of copper surface
LAM RES CORP6 citations62
US6821899B2Nov 23, 2004
System, method and apparatus for improved local dual-damascene planarization
LAM RES CORP6 citations62
US8017516B2Sep 13, 2011
Method for stress free conductor removal
LAM RES CORP0 citations51
US7959984B2Jun 14, 2011
Methods and arrangement for the reduction of byproduct deposition in a plasma processing system
LAM RES CORP1 citations51