Inventor
SHIKIDA MITSUHIRO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “SHIKIDA MITSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
3 patentsUS5380396AJan 10, 1995
Valve and semiconductor fabricating equipment using the same
HITACHI LTD164 citations97
US5284179AFeb 8, 1994
Valve and semiconductor fabricating equipment using the same
HITACHI LTD47 citations94
US5488255AJan 30, 1996
Cooling device for semiconductor packages, having flexible film heat expulsion means
HITACHI LTD26 citations92