Inventor · disambiguated record
Shigeo Oshiro
Also filed as: OSHIRO SHIGEO
4 granted patents·1 citations·filing 2009–2018
57Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0164US9953849B2Platen for reducing particle contamination on a substrate and a method thereofVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Apr 24, 2018·1 cites·13 claims
- 0255US10658207B2Platen for reducing particle contamination on a substrate and a method thereofVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted May 19, 2020·0 cites·11 claims
- 0341US8681472B2Platen ground pin for connecting substrate to groundSUURONEN DAVID E·Filed 2009·Granted Mar 25, 2014·0 cites·8 claims
- 0436US9082804B2Triboelectric charge controlled electrostatic clampBLAKE JULIAN·Filed 2011·Granted Jul 14, 2015·0 cites·16 claims
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