P

Inventor

RIAF ARTHUR P

US6 patents
⚠️ This page may combine multiple inventors who share the name “RIAF ARTHUR P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

3 patents
US10658207B2May 19, 2020

Platen for reducing particle contamination on a substrate and a method thereof

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations48
US9953849B2Apr 24, 2018

Platen for reducing particle contamination on a substrate and a method thereof

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations48
US10001161B2Jun 19, 2018

Rotary flex union

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations46

FISH ROGER B

1 patent
US8149256B2Apr 3, 2012

Techniques for changing temperature of a platen

FISH ROGER B2 citations59

VARIAN SEMICONDUCTOR EQUIPMENT

1 patent
US9377048B2Jun 28, 2016

Rotary flex union

VARIAN SEMICONDUCTOR EQUIPMENT0 citations46

SUURONEN DAVID E

1 patent
US8681472B2Mar 25, 2014

Platen ground pin for connecting substrate to ground

SUURONEN DAVID E0 citations42