Inventor

PENG HUA-WEI

TW3 patents

Patents

3 patents

US11551955B2Jan 10, 2023

Substrate processing apparatus equipped with substrate scanner

UNITED MICROELECTRONICS CORP2 citations58

US12259657B2Mar 25, 2025

Lithography system and method of detecting fluid leakage in liquid storage tank of the same

UNITED MICROELECTRONICS CORP0 citations52

US9978795B1May 22, 2018

Semiconductor structure

UNITED MICROELECTRONICS CORP1 citations45