Inventor
LOWRANCE ROBERT
US19 patents
⚠️ This page may combine multiple inventors who share the name “LOWRANCE ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS5447409ASep 5, 1995
Robot assembly
APPLIED MATERIALS INC144 citations99
US7925377B2Apr 12, 2011
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC45 citations97
US7743728B2Jun 29, 2010
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC36 citations96
US7694647B2Apr 13, 2010
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC42 citations96
US7651306B2Jan 26, 2010
Cartesian robot cluster tool architecture
APPLIED MATERIALS INC50 citations93
US7798764B2Sep 21, 2010
Substrate processing sequence in a cartesian robot cluster tool
APPLIED MATERIALS INC22 citations92
US7374393B2May 20, 2008
Method of retaining a substrate during a substrate transferring process
APPLIED MATERIALS INC17 citations92
US7374391B2May 20, 2008
Substrate gripper for a substrate handling robot
APPLIED MATERIALS INC9 citations83
US5678980AOct 21, 1997
Robot assembly
APPLIED MATERIALS INC13 citations74
ISHIKAWA TETSUYA
4 patentsUS8550031B2Oct 8, 2013
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA13 citations92
US8215262B2Jul 10, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA15 citations92
US8181596B2May 22, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA15 citations92
US8146530B2Apr 3, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA22 citations92