Inventor
OBENG YAW SAMUEL
US13 patents
⚠️ This page may combine multiple inventors who share the name “OBENG YAW SAMUEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUCENT TECHNOLOGIES INC
9 patentsUS5735963AApr 7, 1998
Method of polishing
LUCENT TECHNOLOGIES INC94 citations97
US6083810AJul 4, 2000
Integrated circuit fabrication process
LUCENT TECHNOLOGIES INC73 citations95
US6162733ADec 19, 2000
Method for removing contaminants from integrated circuits
LUCENT TECHNOLOGIES INC27 citations92
US5836805ANov 17, 1998
Method of forming planarized layers in an integrated circuit
LUCENT TECHNOLOGIES INC32 citations92
US6150271ANov 21, 2000
Differential temperature control in chemical mechanical polishing processes
LUCENT TECHNOLOGIES INC34 citations91
US6015333AJan 18, 2000
Method of forming planarized layers in an integrated circuit
LUCENT TECHNOLOGIES INC13 citations73
US5670376ASep 23, 1997
Methodology for monitoring solvent quality
LUCENT TECHNOLOGIES INC9 citations73
US5966627AOct 12, 1999
In-situ doped silicon layers
LUCENT TECHNOLOGIES INC5 citations61
US5712176AJan 27, 1998
Doping of silicon layers
LUCENT TECHNOLOGIES INC2 citations56