Inventor
ERA ATSUSHI
JP8 patents
Patents
8 patentsUS11444172B2Sep 13, 2022
Method for producing semiconductor device and semiconductor device
MITSUBISHI ELECTRIC CORP4 citations68
US9728611B2Aug 8, 2017
GaN semiconductor device comprising carbon and iron
MITSUBISHI ELECTRIC CORP3 citations68
US12136795B2Nov 5, 2024
Method for producing photosemiconductor device
MITSUBISHI ELECTRIC CORP0 citations58
US9355841B2May 31, 2016
Manufacturing method of high electron mobility transistor
MITSUBISHI ELECTRIC CORP0 citations50
US12334340B2Jun 17, 2025
Epitaxial wafer, semiconductor device, and method for manufacturing epitaxial wafer
MITSUBISHI ELECTRIC CORP0 citations47
US9793363B1Oct 17, 2017
GaN semiconductor device comprising carbon and iron
MITSUBISHI ELECTRIC CORP0 citations47
US9478418B2Oct 25, 2016
Method of manufacturing semiconductor element
MITSUBISHI ELECTRIC CORP0 citations40
US10199218B2Feb 5, 2019
Method for manufacturing group III-V nitride semiconductor epitaxial wafer
MITSUBISHI ELECTRIC CORP0 citations36