Inventor
CHEN JHUN HUA
TW13 patents
⚠️ This page may combine multiple inventors who share the name “CHEN JHUN HUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
8 patentsUS9711367B1Jul 18, 2017
Semiconductor method with wafer edge modification
TAIWAN SEMICONDUCTOR MFG CO LTD23 citations92
US9799567B2Oct 24, 2017
Method of forming source/drain contact
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations83
US10163720B2Dec 25, 2018
Method of forming source/drain contact
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US11988972B2May 21, 2024
Method and apparatus for improving critical dimension variation
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US11579539B2Feb 14, 2023
Method and apparatus for improving critical dimension variation
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations68
US12379674B2Aug 5, 2025
Method and apparatus for improving critical dimension variation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US10522413B2Dec 31, 2019
Method of forming source/drain contact
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9905471B2Feb 27, 2018
Integrated circuit structure and method forming trenches with different depths
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations39
TAIWAN SEMICONDUCTOR MFG
4 patentsUS7767570B2Aug 3, 2010
Dummy vias for damascene process
TAIWAN SEMICONDUCTOR MFG15 citations91
US7960821B2Jun 14, 2011
Dummy vias for damascene process
TAIWAN SEMICONDUCTOR MFG6 citations72
US7939222B2May 10, 2011
Method and system for improving printing accuracy of a contact layout
TAIWAN SEMICONDUCTOR MFG3 citations61
US9070688B2Jun 30, 2015
Method of patterning a semiconductor device having improved spacing and shape control and a semiconductor device
TAIWAN SEMICONDUCTOR MFG0 citations51