Inventor
CHUANG TENG KUEI
TW5 patents
Patents
5 patentsUS11988972B2May 21, 2024
Method and apparatus for improving critical dimension variation
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US11579539B2Feb 14, 2023
Method and apparatus for improving critical dimension variation
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations68
US12379674B2Aug 5, 2025
Method and apparatus for improving critical dimension variation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US9698014B2Jul 4, 2017
Photoresist composition to reduce photoresist pattern collapse
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41
US9651870B2May 16, 2017
Method and tool of lithography
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations41