Inventor
HAH SANG-LOCK
KR2 patents
Patents
2 patentsUS6513538B2Feb 4, 2003
Method of removing contaminants from integrated circuit substrates using cleaning solutions
SAMSUNG ELECTRONICS CO LTD95 citations96
US6537876B2Mar 25, 2003
Method of manufacturing a semiconductor capacitor having a hemispherical grain layer using a dry cleaning process
SAMSUNG ELECTRONICS CO LTD15 citations82