Inventor
CHUNG MIN-JAE
KR4 patents
⚠️ This page may combine multiple inventors who share the name “CHUNG MIN-JAE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV SUNGKYUNKWAN
3 patentsUS6926799B2Aug 9, 2005
Etching apparatus using neutral beam
UNIV SUNGKYUNKWAN19 citations90
US7094702B2Aug 22, 2006
Layer-by-layer etching apparatus using neutral beam and method of etching using the same
UNIV SUNGKYUNKWAN6 citations71
US6874443B2Apr 5, 2005
Layer-by-layer etching apparatus using neutral beam and etching method using the same
UNIV SUNGKYUNKWAN5 citations60