P
PatentIndex
Search
Landscape
Sign in
Inventor
CHUNG SAE-HOON
KR
2 patents
Patents
2 patents
US7094702B2
Aug 22, 2006
Layer-by-layer etching apparatus using neutral beam and method of etching using the same
UNIV SUNGKYUNKWAN
6 citations
71
US6874443B2
Apr 5, 2005
Layer-by-layer etching apparatus using neutral beam and etching method using the same
UNIV SUNGKYUNKWAN
5 citations
60