Inventor

MATZ PHILLIP DANIEL

US2 patents

Patents

2 patents

US7727885B2Jun 1, 2010

Reduction of punch-thru defects in damascene processing

TEXAS INSTRUMENTS INC1 citations46

US7732345B2Jun 8, 2010

Method for using a modified post-etch clean rinsing agent

TEXAS INSTRUMENTS INC0 citations40