Inventor
HURD TRACE
US5 patents
⚠️ This page may combine multiple inventors who share the name “HURD TRACE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS12002687B2Jun 4, 2024
System and methods for wafer drying
TOKYO ELECTRON LTD0 citations56
US11515178B2Nov 29, 2022
System and methods for wafer drying
TOKYO ELECTRON LTD0 citations56
US10886290B2Jan 5, 2021
Etching of silicon nitride and silica deposition control in 3D NAND structures
TOKYO ELECTRON LTD1 citations54
US10844332B2Nov 24, 2020
Aqueous cleaning solution and method of protecting features on a substrate during etch residue removal
TOKYO ELECTRON LTD0 citations49