Inventor
DENNING DEAN J
US14 patents
⚠️ This page may combine multiple inventors who share the name “DENNING DEAN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOTOROLA INC
12 patentsUS5308788AMay 3, 1994
Temperature controlled process for the epitaxial growth of a film of material
MOTOROLA INC330 citations99
US6187682B1Feb 13, 2001
Inert plasma gas surface cleaning process performed insitu with physical vapor deposition (PVD) of a layer of material
MOTOROLA INC94 citations97
US5893752AApr 13, 1999
Process for forming a semiconductor device
MOTOROLA INC142 citations97
US6218302B1Apr 17, 2001
Method for forming a semiconductor device
MOTOROLA INC222 citations96
US6136682AOct 24, 2000
Method for forming a conductive structure having a composite or amorphous barrier layer
MOTOROLA INC73 citations96
US6500315B1Dec 31, 2002
Method and apparatus for forming a layer on a substrate
MOTOROLA INC15 citations92
US6294458B1Sep 25, 2001
Semiconductor device adhesive layer structure and process for forming structure
MOTOROLA INC36 citations92
US6139696AOct 31, 2000
Method and apparatus for forming a layer on a substrate
MOTOROLA INC18 citations92
US5958508ASep 28, 1999
Process for forming a semiconductor device
MOTOROLA INC29 citations90
US6451181B1Sep 17, 2002
Method of forming a semiconductor device barrier layer
MOTOROLA INC36 citations87
US6632689B2Oct 14, 2003
Method for processing semiconductor wafers in an enclosure with a treated interior surface
MOTOROLA INC2 citations62
US6476623B1Nov 5, 2002
Percent backsputtering as a control parameter for metallization
MOTOROLA INC1 citations50