Inventor
RODNICK MATTHEW J
US7 patents
⚠️ This page may combine multiple inventors who share the name “RODNICK MATTHEW J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS9779977B2Oct 3, 2017
End effector assembly for clean/dirty substrate handling
LAM RES CORP5 citations80
US9698035B2Jul 4, 2017
Microstructures for improved wafer handling
LAM RES CORP3 citations69
US9184084B2Nov 10, 2015
Wafer handling traction control system
LAM RES CORP3 citations59
US10707113B2Jul 7, 2020
End effector assembly for clean/dirty substrate handling
LAM RES CORP0 citations48
US9434071B2Sep 6, 2016
Wafer handling traction control system
LAM RES CORP0 citations48